JPH01133731U - - Google Patents
Info
- Publication number
- JPH01133731U JPH01133731U JP2960688U JP2960688U JPH01133731U JP H01133731 U JPH01133731 U JP H01133731U JP 2960688 U JP2960688 U JP 2960688U JP 2960688 U JP2960688 U JP 2960688U JP H01133731 U JPH01133731 U JP H01133731U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- mounting surface
- supported
- support pins
- quartz holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2960688U JPH01133731U (en]) | 1988-03-04 | 1988-03-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2960688U JPH01133731U (en]) | 1988-03-04 | 1988-03-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01133731U true JPH01133731U (en]) | 1989-09-12 |
Family
ID=31253966
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2960688U Pending JPH01133731U (en]) | 1988-03-04 | 1988-03-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01133731U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017220536A (ja) * | 2016-06-06 | 2017-12-14 | 三菱電機株式会社 | 成膜装置および太陽電池の製造方法 |
-
1988
- 1988-03-04 JP JP2960688U patent/JPH01133731U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017220536A (ja) * | 2016-06-06 | 2017-12-14 | 三菱電機株式会社 | 成膜装置および太陽電池の製造方法 |